William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Robert F. Gordon, Edward A. MacNair, et al.
WSC 1985
David L. Shealy, John A. Hoffnagle
SPIE Optical Engineering + Applications 2007
M. Tismenetsky
International Journal of Computer Mathematics