Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We have simulated the nonlinear dynamics of a two-dimensional lattice of damped-driven oscillators where the dynamical state of the isolated individual oscillator is chaotic. Harmonic coupling between these oscillators results in a very rich and complex spatiotemporal dynamics as a function of coupling strength. The dynamics is characterized by coherent clusters of energy moving randomly in a structureless background, growing in size with increasing coupling, and undergoing a sequence of "freezing transitions" until a coupling is reached where a single cluster dominates the lattice extent. The intricate interplay of coherent and random dynamics suggests a possible analogy with high Reynolds number turbulent flow. Extended self-similarity proposed for turbulent flows and applied to this problem indicates a universality in the dynamics. This suggests that the extension to other (more realistic) representations of physical systems may provide a fruitful paradigm for studying dynamical disorder in the real world. © 1994 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
David B. Mitzi
Journal of Materials Chemistry
R.D. Murphy, R.O. Watts
Journal of Low Temperature Physics
Mark W. Dowley
Solid State Communications