Conference paper
Optimization of real phase-mask performance
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
No abstract available.
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
George Markowsky
J. Math. Anal. Appl.
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SCC 2007
J. LaRue, C. Ting
Proceedings of SPIE 1989