Ion beam oxidation
J.M.E. Harper, M. Heiblum, et al.
Journal of Applied Physics
The authors report the first successful fabrication of a lateral hot-electron transistor. Using energy spectroscopy, they have demonstrated the existence of ballistic transport in the plane of a 2DEG. The structure has been made by deposition of two metallic gates, each some 50 nm long, separated by 80-200 nm, on a selectively doped high-mobility GaAs/AlGaAs heterostructure. By applying negative bias to the gates, two potential barriers were formed under them that divided the plane into three regions--injection, transport, and collection-all contacted with ohmic contacts. One barrier served as a tunneling injector while the other played the role of a spectrometer. Operating the device as a hot-electron theta device and performing energy spectroscopy, hot-electron distributions, no more than 5 meV wide, were measured at the collector.
J.M.E. Harper, M. Heiblum, et al.
Journal of Applied Physics
T.P. Smith III, B.B. Goldberg, et al.
Surface Science
Y. Guldner, M. Voos, et al.
Physical Review B
M. Heiblum
TMPEO 1986