A.B. McLean, R.H. Williams
Journal of Physics C: Solid State Physics
Voltages have been measured in the scanning electron microscope by passing the secondary electrons through an electrostatic energy analyser between the specimen and the electron detector. Experimental results are described in which (i) some sources of image contrast are investigated and (ii) the reverse characteristic of a p-into-n diffused device is measured by a contactless method.
A.B. McLean, R.H. Williams
Journal of Physics C: Solid State Physics
A. Krol, C.J. Sher, et al.
Surface Science
Ming L. Yu
Physical Review B
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007