R.J. Gambino, N.R. Stemple, et al.
Journal of Physics and Chemistry of Solids
Five different fluorinated polyimides were characterized using X-ray photoelectron spectroscopy (XPS). Elemental compositions and polyimide stoichiometries as elucidated with XPS are reported. The fluorinated polyimides derived from corresponding poly(amic acid)s were completely imidizedafter thermal cure at 350°C, giving rise to a single N 1s peak at 400.8 eV. Interestingly, fluorine segregation on the cured polyimide surface was found to be a function of the polyimide backbone stiffness. © 1996 Taylor & Francis Group, LLC.
R.J. Gambino, N.R. Stemple, et al.
Journal of Physics and Chemistry of Solids
Hiroshi Ito, Reinhold Schwalm
JES
T.N. Morgan
Semiconductor Science and Technology
U. Wieser, U. Kunze, et al.
Physica E: Low-Dimensional Systems and Nanostructures