Selective reactive ion etching of phosphorus-doped oxide over undoped SiO2
- David Vender
- Gottlieb S. Oehrlein
- et al.
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
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Reactive ion etching induced corrosion of Al and Al-Cu films
- Wen-Yaung Lee
- J.M. Eldridge
- et al.
- 1981
- Journal of Applied Physics