Publications

3 results for A.C. Lamberti

An electron microscope investigation of the effect of phosphorous doping on the plasma etching of polycrystalline silicon
- - E.A. Irene
  - E. Tierney
  - et al.
- 2019
- JES
Patterning of 100 nm features using X-ray lithography
- - Azalia A. Krasnoperova
  - Scott Hector
  - et al.
- 1997
- J. Photopolym. Sci. Tech.
Highly selective KOH-based etchant for boron-doped silicon structures
- - E. Bassous
  - A.C. Lamberti
- 1989
- Microelectronic Engineering