Sub-20 nm abrupt USJ formation with long ms-flash with sub-2 nm dopant motion control
- Kam-Leung Lee
- Isaac Lauer
- et al.
- 2010
- IWJT 2010
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4 results for J. Gelpey
RAPID ANNEALING OF SILICON.
- R.T. Hodgson
- V.R. Deline
- et al.
- 1983
- MRS Proceedings 1983
Uniformity characterization of an RTP system
- Jeffrey C. Gelpey
- Paul O. Stump
- et al.
- 1987
- Nuclear Inst. and Methods in Physics Research, B
Rapid thermal annealing of boron-implanted silicon using an ultrahigh power arc lamp
- R.T. Hodgson
- V.R. Deline
- et al.
- 1984
- Applied Physics Letters