Rapid annealing and the anomalous diffusion of ion implanted boron into silicon
- Alwin E. Michel
- W. Rausch
- et al.
- 1987
- Applied Physics Letters
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4 results for R.H. Kastl
Channeling in low energy boron ion implantation
- Alwin E. Michel
- R.H. Kastl
- et al.
- 1984
- Applied Physics Letters
The poly-single crystalline silicon interface
- C.Y. Wong
- Alwin E. Michel
- et al.
- 1984
- Journal of Applied Physics
Ion-implanted polysilicon diffusion sources
- Alwin E. Michel
- R.H. Kastl
- et al.
- 1983
- Nuclear Instruments and Methods In Physics Research