Exploring the stochastics cliff: Understanding the impact of LER/LWR to stochastic defectivity and yield
- Jennifer Church
- Graham Jensen
- et al.
- 2021
- SPIE Photomask Technology + EUV Lithography 2021
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Missing Via Defect Capture Enhancement Using a Novel, High-Precision Array Segmentation Inspection Technique
- Graham Jensen
- Vidyasagar Anantha
- et al.
- 2021
- ASMC 2021