Effects of grain-boundary trapping-state energy distribution on the activation energy of resistivity of polycrystalline-silicon films
- Chih-Yuan Lu
- Nicky Chau-Chun Lu
- et al.
- 1984
- Solid-State Electronics
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The Effect of film thickness on the electrical properties of LPCVD polysilicon films
- T.T. Sheng
- C.C. Shih
- et al.
- 1984
- JES