Interfacial reactions between Al and RuO2, MoOx and WNx diffusion barriers on Si
- S.-E. Hörnström
- A. Charai
- et al.
- 2004
- Surface and Interface Analysis
Publications
Date
Featured collections
Popular topics
3 results for A. Robertsson
TIN formed by ion beam nitriding of TiSi2
- S.E. Harnstrarn
- D. Moy
- et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Crystallization of amorphous silicon during thin-film gold reaction
- L. Hultman
- A. Robertsson
- et al.
- 1987
- Journal of Applied Physics