Effects of bias and inert gas on properties of diamond-like carbon deposited by d.c. PACVD
- A. Grill
- V.V. Patel
- 1994
- Diamond and Related Materials
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Tribological properties of diamond-like carbon and related materials
- A. Grill
- V.V. Patel
- 1993
- Diamond and Related Materials
Tribological properties of diamond-like carbon and related materials
- A. Grill
- V.V. Patel
- 1993
- Diamond and Related Materials
Stresses in diamond-like carbon films
- Alfred Grill
- Vishnubhai Patel
- 1993
- Diamond and Related Materials
Characterization of diamondlike carbon by infrared spectroscopy
- A. Grill
- V.V. Patel
- 1992
- Applied Physics Letters
Tribological behavior of diamond-like carbon: effects of preparation conditions and annealing
- A. Grill
- V.V. Patel
- et al.
- 1991
- Surface and Coatings Technology
Diamond-like carbon as an electrical insulator of copper devices for chip cooling
- E. Marotta
- N. Bakhru
- et al.
- 1991
- Thin Solid Films
Diamondlike carbon films by rf plasma-assisted chemical vapor deposition from acetylene
- A. Grill
- B.S. Meyerson
- et al.
- 1990
- IBM J. Res. Dev
Composition and structure of boron nitride films deposited by chemical vapor deposition from borazine
- J. Kouvetakis
- V.V. Patel
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Inhomogeneous carbon bonding in hydrogenated amorphous carbon films
- A. Grill
- B.S. Meyerson
- et al.
- 1987
- Journal of Applied Physics