Hydrocarbon reaction with HF-cleaned Si(100) and effects on metal-oxide-semiconductor device quality
- S.R. Kasi
- M. Liehr
- et al.
- 1991
- Applied Physics Letters
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3 results for H. Dallaporta
Silicon dioxide defects induced by metal impurities
- H. Dallaporta
- M. Liehr
- et al.
- 1990
- Physical Review B
Defect formation in SiO2/Si(100) by metal diffusion and reaction
- M. Liehr
- H. Dallaporta
- et al.
- 1988
- Applied Physics Letters