Evaluation of the defense advanced lithography program (DALP) X-ray lithography aligner
- A.C. Chen
- A. Flamholz
- et al.
- 1997
- Microlithography 1997
Publications
Date
Featured collections
Popular topics
4 results for R. Rippstein
Experimental demonstration of the validity of accelerated radiation damage testing of x-ray mask materials
- R.E. Acosta
- R. Rippstein
- 1998
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Measurement of the effective wavelength of x-ray lithography sources
- Juan R. Maldonado
- Inna Babich
- et al.
- 1993
- Microelectronic Engineering
Fully scaled 0.5 μm MOS circuits by synchrotron radiation X-ray lithography: Devices fabrication and overlay evaluation
- J. Silverman
- V. Dimilia
- et al.
- 1989
- Microelectronic Engineering