Aids for driving lithography hard: Wafer level process control features
- Emily Fisch
- Reginald Bowley
- et al.
- 2001
- Microlithography 2001
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3 results for O. Bula
High performance 0.13 μm SOI CMOS technology with Cu interconnects and low-k BEOL dielectric
- P. Smeys
- V. McGahay
- et al.
- 2000
- VLSI Technology 2000
The use of simulation in semiconductor technology development
- D.C. Cole
- E.M. Buturla
- et al.
- 1990
- Solid State Electronics