Thermal ammonia nitridation on HfO2 and hafnium silicates thin films
- J.-J. Ganem
- I. Trimaille
- et al.
- 2006
- Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
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Oxygen interaction with defects at the Si/SiO2 interface
- J.H. Stathis
- S. Rigo
- et al.
- 1991
- Solid State Communications