Laser driven boron diffusion from a p+ Si substrate into a thick n- Si epitaxial layer
- R.J. van Gutfold
- R. Vigliotti
- et al.
- 1992
- CLEO 1992
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2 results for S.F. Chu
Laser-driven boron diffusion into a Si epitaxial layer from a p+ boron-doped Si substrate
- K.M. Kim
- S.N. Mei
- et al.
- 1992
- Applied Physics Letters