Publications

2 results for Yoshiharu Terui

High contact angle fluorosulfonamide-based materials for immersion lithography
- - Daniel P. Sanders
  - Linda K. Sundberg
  - et al.
- 2010
- Proceedings of SPIE - The International Society for Optical Engineering 2010
Hybrid Resist Systems Based on a-Substituted Acrylate Copolymers
- - Hiroshi Ito
  - Linda K. Sundberg
  - et al.
- 2009
- SPIE Advanced Lithography 2009