A MICRO-ACTUATOR FOR A HARD-DISK DRIVE FINE TRACKING SERVO
- Toshiki Hirano
- Long-Sheng Fan
- et al.
- 1998
- IMECE 1998
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18 results for Toshiki Hirano
MEMS milliactuator for hard-disk-drive tracking servo
- Toshiki Hirano
- Long-Sheng Fan
- et al.
- 1998
- JMEMS
High aspect ratio etching in polymer for microactuator applications
- W.Y. Lee
- J. Gao
- et al.
- 1997
- SPIE Micromachining and Microfabrication 1997
Invar electrodeposition for MEMS application
- T. Hirano
- L.-S. Fan
- 1996
- SPIE Micromachining and Microfabrication 1996
Dry-released nickel micromotors with low-friction bearing structure
- T. Hirano
- T. Furuhata
- et al.
- 1995
- IEICE Transactions on Electronics
Electroplated and dry-released metallic microstructures for a lateral tunneling unit application
- Toshiki Hirano
- Dai Kobayashi
- et al.
- 1994
- Japanese Journal of Applied Physics
Design, fabrication, and operation of submicron gap comb-drive microactuators
- Toshiki Hirano
- Tomotake Furuhata
- et al.
- 1992
- JMEMS
Sub-micron gaps without sub-micron etching
- T. Furuhata
- T. Hirano
- et al.
- 1991
- MEMS 1991