CMOS compatible cost-efficient fabrication of SOI grating couplers
- Jens Bolten
- Jens Hofrichter
- et al.
- 2009
- Microelectronic Engineering
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Fabrication and characterization of Ta2O5 photonic feedback structures
- T. Wahlbrink
- J. Bolten
- et al.
- 2008
- Microelectronic Engineering