Structural, electronic, and dielectric properties of ultrathin zirconia films on silicon
- S. Sayan
- N.V. Nguyen
- et al.
- 2005
- Applied Physics Letters
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3 results for H. Kim
The physical properties of cubic plasma-enhanced atomic layer deposition TaN films
- H. Kim
- C. Lavoie
- et al.
- 2004
- Journal of Applied Physics
Growth kinetics and initial stage growth during plasma-enhanced Ti atomic layer deposition
- H. Kim
- S.M. Rossnagel
- 2002
- Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films