0.1 μm CMOS and beyond
- Yuan Taur
- Yuh-Jier Mii
- 1993
- VLSI-TSA 1993
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14 results for Y. Mii
Lithography and fabrication processes for sub-100 nm scale complementary metal-oxide semiconductor
- S.J. Wind
- Y. Taur
- et al.
- 1995
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
VLSI on-chip interconnection performance simulations and measurements
- D. Edelstein
- G.A. Sai-Halasz
- et al.
- 1995
- IBM J. Res. Dev
CMOS scaling into the 21st century: 0.1 μm and beyond
- Y. Taur
- Y. Mii
- et al.
- 1995
- IBM J. Res. Dev