Silicon carrier with deep through-vias, fine pitch wiring, and through cavity for parallel optical transceiverChirag S. PatelCornelia K. Tsanget al.2005ECTC 2005
Silicon carrier with deep through-vias, fine pitch wiring, and through cavity for parallel optical transceiverChirag S. PatelCornelia K. Tsanget al.2005ADMETA 2005