Process and Tool Monitoring Strategy for Advanced Magnetic Tunnel Junction Stack Deposition
- Gabriel Rodriguez
- Oscar Van Der Straten
- et al.
- 2024
- ASMC 2024
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First Experimental Demonstration of MRAM Data Scrubbing: 80 Mb MRAM with 40 nm junctions for Last Level Cache Applications
- H. Wu
- V. Katragadda
- et al.
- 2021
- IEDM 2021