Indium Channel Implant for Improved Short-Channel Behavior of Submicrometer NMOSFET'sG. ShahidiBijan Davariet al.1993IEEE Electron Device Letters
Mixed e-beam/optical lithography process for the fabrication of sub-0.25-μm poly gatesKeith T. KwietniakMichael G. Rosenfieldet al.1993Microlithography 1993