Publications

3 results for Hiroyuki Mizuno

Thorough characterization of a EUV mask
- - Hiroyuki Mizuno
  - Gregory McIntyre
  - et al.
- 2009
- Photomask and Next-Generation Lithography Mask Technology 2009
Exposure tool settings and OPC strategies for EUV Lithography at the 16nm node
- - Yunfei Deng
  - Jongwook Kye
  - et al.
- 2009
- SPIE Advanced Lithography 2009
Flare evaluation of ASML alpha demo tool
- - Hiroyuki Mizuno
  - Gregory McIntyre
  - et al.
- 2009
- SPIE Advanced Lithography 2009