Tribochemistry between hydrogen and diamond-like carbon films
- J. Fontaine
- C. Donnet
- et al.
- 2001
- Surface and Coatings Technology
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155 results for Alfred Grill
Tunable anti-reflective coatings with built-in hard mask properties facilitating thin resist processing
- Arpan P. Mahorowala
- Katherina Babich
- et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
Ultralow-k dielectrics prepared by plasma-enhanced chemical vapor deposition
- A. Grill
- V.V. Patel
- 2001
- Applied Physics Letters
Amorphous carbon based materials as the interconnect dielectric in ULSI chips
- A. Grill
- 2001
- Diamond and Related Materials
Tribological and mechanical properties of diamond-like carbon prepared by high-density plasma
- J.C. Sánchez-López
- C. Donnet
- et al.
- 2001
- Diamond and Related Materials
Diamond-like carbon prepared by high density plasma
- J.C. Sánchez-López
- C. Donnet
- et al.
- 2000
- Diamond and Related Materials
Oxygen stoichiometry in PdOx and PdOxPt electrode layers during processing of ferroelectric and high-epsilon perovskites
- K.L. Saenger
- C. Cabral Jr.
- et al.
- 2000
- Journal of Materials Research
Electrical and optical properties of diamond-like carbon
- A. Grill
- 1999
- Thin Solid Films
Solid state 13C and 1H nuclear magnetic resonance investigations of hydrogenated amorphous carbon
- C. Donnet
- J. Fontaine
- et al.
- 1999
- Journal of Applied Physics
Low dielectric constant films prepared by plasma-enhanced chemical vapor deposition from tetramethylsilane
- A. Grill
- V.V. Patel
- 1999
- Journal of Applied Physics