Sub-10 Nanometer Feature Size in Silicon Using Thermal Scanning Probe Lithography
- Yu Kyoung Ryu
- Colin D. Rawlings
- et al.
- 2017
- ACS Nano
Publications
Date
Featured collections
Popular topics
4 results for Samuel Bisig
Nanopatterning of phase-change material thin films for tunable photonics
- Laric Bobzien
- Ann-Katrin U. Michel
- et al.
- 2021
- CLEO/Europe 2021
Nanopatterning of Phase-Change Material Thin Films for Tunable Photonics
- Laric Bobzien
- Ann-Katrin U. Michel
- et al.
- 2021
- CLEO/Europe-EQEC 2021
Thermal Scanning Probe Lithography (t-SPL) for Nano-Fabrication
- Heiko Wolf
- Yu Kyoung Ryu
- et al.
- 2019
- Pan Pacific 2019