Measurements of metal gate effective work function by x-ray photoelectron spectroscopy
- Yuri Lebedinskii
- Andrei Zenkevich
- et al.
- 2007
- Journal of Applied Physics
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In situ investigation of growth and thermal stability of ultrathin Si layers on the HfO 2/Si (100) high- κ dielectric system
- Yu.Yu. Lebedinskii
- A. Zenkevich
- et al.
- 2005
- Applied Physics Letters