Adhesion between template materials and UV-cured nanoimprint resists
- Frances A. Houle
- Eric Guyer
- et al.
- 2006
- SPIE Advanced Lithography 2006
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Adhesion between template materials and UV-cured nanoimprint resists
- F.A. Houle
- Eric Guyer
- et al.
- 2007
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures