Three-dimensional imaging of nano-voids in copper interconnects using incoherent bright field (IBF) tomography
- P.A. Ercius
- D.A. Muller
- et al.
- 2006
- M&M 2006
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Three-dimensional imaging of nano-voids in copper interconnects using incoherent bright field (IBF) tomography
- Peter Ercius
- David A. Muller
- et al.
- 2006
- AMC 2006
Three-dimensional imaging of nanovoids in copper interconnects using incoherent bright field tomography
- Peter Ercius
- Matthew Weyland
- et al.
- 2006
- Applied Physics Letters