Improved hot-carrier reliability of SOI transistors by deuterium passivation of defects at oxide/silicon interfaces
- Kangguo Cheng
- Jinju Lee
- et al.
- 2002
- IEEE Transactions on Electron Devices
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Isotope exchange in hydrogenated silicon-oxynitride (SiON) for 1.55μm optical waveguide applications
- Jinju Lee
- Kangguo Cheng
- et al.
- 2000
- Materials Research Society Symposium-Proceedings