Sub-μm, planarized, Nb-AlOx-Nb Josephson process for 125 mm wafers developed in partnership with Si technology
- M.B. Ketchen
- D.J. Pearson
- et al.
- 1991
- Applied Physics Letters
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Low noise de squids fabricated in Nb-Al2O3-Nb trilayer technology
- M.B. Ketchen
- S.B. Kaplan
- et al.
- 1991
- IEEE Transactions on Magnetics