Structure-property relationships for nano-porous poly(methyl-silsesquioxane) films with low-dielectric constants prepared via organic/inorganic polymer hybrids
- Cattien Nguyen
- R. Beyers
- et al.
- 1999
- ACS Spring 1999
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Low-dielectric, nanoporous organosilicate films prepared via inorganic/organic polymer hybrid templates
- Cattien V. Nguyen
- Kenneth R. Carter
- et al.
- 1999
- Chemistry of Materials