Patterned nanoporous poly(methylsilsesquioxane) thin films: A potential high density substrate
- Zach L. Hogan
- Cortney R. Kreller
- et al.
- 2004
- Materials Science and Engineering C
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156 results for Willi Volksen
Photopatterned nanoporous media
- Ho-Cheol Kim
- Gregory Wallraff
- et al.
- 2004
- Nano Letters
ToF-SIMS studies of nanoporous PMSSQ materials: Kinetics and reactions in the processing of low-K dielectrics for ULSI applications
- P. Lazzeri
- G.W. Rubloff
- et al.
- 2004
- Surface and Interface Analysis
Pore morphologies in disordered nanoporous thin films
- Jonathan A. Hedstrom
- Michael F. Toney
- et al.
- 2003
- Langmuir
Miscibility in organic/inorganic hybrid nanocomposites suitable for microelectronic applications: Comparison of modulated differential scanning calorimetry and fluorescence spectroscopy
- Q.R. Huang
- Ho-Cheol Kim
- et al.
- 2003
- Macromolecules
Templating of silsesquioxane cross-linking using unimolecular self-organizing polymers
- Eric F. Connor
- Linda K. Sundberg
- et al.
- 2003
- Angewandte Chemie - International Edition
Supercritical carbon dioxide extraction of porogens for the preparation of ultralow-dielectric-constant films
- T. Rajagopalan
- B. Lahlouh
- et al.
- 2003
- Applied Physics Letters
Versatile synthesis of nanometer sized hollow silica spheres
- Jeroen J. L. M. Cornelissen
- Eric F. Connor
- et al.
- 2003
- Chemical Communications
Miscibility behavior and reequilibration of binary poly(amic acid) mixtures
- M. Ree
- D.Y. Yoon
- et al.
- 2003
- Journal of Polymer Science, Part B: Polymer Physics
Structure and properties of thin films of binary rodlike/flexible polyimide mixtures
- S. Rojstaczer
- M. Ree
- et al.
- 2003
- Journal of Polymer Science, Part B: Polymer Physics