Reduction of intrinsic stress in cubic boron nitride films
- J. Ullmann
- A.J. Kellock
- et al.
- 1999
- Thin Solid Films
Publications
Date
Featured collections
Popular topics
3 results for J. Ullmann
Effects of MeV ion irradiation of thin cubic boron nitride films
- J. Ullmann
- J.E.E. Baglin
- et al.
- 1998
- Journal of Applied Physics
Low energy ion assisted carbon film growth: Methods and mechanisms
- Jens Ullmann
- 1997
- Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms