Mask technology for excimer laser projection ablation
- J.L. Speidell
- S. Cordes
- et al.
- 1997
- BACUS Symposium on Photomask Technology and Management 1997
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4 results for R.S. Patel
Low-cost mask for excimer laser projection ablation
- James L. Speidell
- Rajesh S. Patel
- et al.
- 1996
- BACUS Symposium on Photomask Technology and Management 1996
Masks for laser ablation technology: new requirements and challenges
- J.L. Speidell
- Doris Pulaski
- et al.
- 1995
- BACUS Symposium on Photomask Technology and Management 1995
A novel aluminum on quartz mask for excimer laser projection ablation
- R.S. Patel
- J.L. Speidell
- et al.
- 1997
- International Journal of Microcircuits and Electronic Packaging