Simulation of X-ray mask defect printability
- B.S. Bollepalli
- Scott D. Hector
- et al.
- 1997
- Microlithography 1997
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X-ray lithography for ≤100 nm ground rules in complex patterns
- Scott Hector
- Victor Pol
- et al.
- 1997
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures