Fabrication of a silicon-Pyrex-silicon stack by a.C. Anodic bonding
- M. Despont
- H. Gross
- et al.
- 1996
- Sensors and Actuators, A: Physical
Publications
6 results for C. Stebler
Fabrication of an integrated silicon-based lens for low-energy miniaturized electron columns
- Michel Despont
- Gilles Beljakovic
- et al.
- 1996
- Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Electron-beam microcolumn fabrication and testing
- M. Despont
- U. Staufer
- et al.
- 1996
- Microelectronic Engineering
Microcolumn based low energy e-beam writing
- C. Stebler
- M. Despont
- et al.
- 1996
- Microelectronic Engineering
Secondary electron imaging by means of a microfabricated electron column
- C. Stebler
- M. Despont
- et al.
- 1996
- Journal de Physique III
Microfabrication of lenses of a miniaturized electron column
- M. Despont
- U. Staufer
- et al.
- 1995
- Microelectronic Engineering