High pressure oxidation induced stress in submicron trench structures
- R. Stengl
- H.-J. Timme
- et al.
- 1996
- Applied Physics Letters
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Effects of surface oxide on the rapid thermal nitridation of Si(001)
- M. Copel
- R.M. Tromp
- et al.
- 1996
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films