Structure in thin and ultrathin spin-cast polymer films
- Curtis W. Frank
- V. Rao
- et al.
- 1996
- Science
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3 results for V. Rao
Role of residual casting solvent in dissolution behavior of poly (3-methyl-4-hydroxystyrene) films
- Veena Rao
- William D. Hinsberg
- et al.
- 1994
- Microlithography 1994
The influence of residual casting solvent on the dissolution behavior of diazonaphthoquinone resists
- V. Rao
- W.D. Hinsberg
- et al.
- 1993
- Microlithography 1993