Doping profiling with scanning surface harmonic microscopy
- M. Johnson
- J.P. Bourgoin
- et al.
- 1995
- Microelectronic Engineering
Publications
3 results for J.P. Bourgoin
Characterization of electron beam induced modification of thermally grown SiO2
- J.R. Barnes
- A.C.F. Hoole
- et al.
- 1995
- Applied Physics Letters
Semiconductor characterization with the scanning surface harmonic microscope
- J.P. Bourgoin
- M. Johnson
- et al.
- 1994
- Applied Physics Letters