Inductively coupled plasma etching of CoFeB, CoZr, CoSm and FeMn thin films in interhalogen mixturesH. ChoK.B. Junget al.1999Materials Science and Engineering B: Solid-State Materials for Advanced Technology
Magneto-optical studies of Sm(Fe,Ti)12 perpendicular textured sputtered filmsF.J. CadieuA. Navarathnaet al.1993Journal of Applied Physics