Silane decomposition on Cu interconnects inhibited by ammonia
- E. Todd Ryan
- Steven Molis
- et al.
- 2010
- JES
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34 results for E. T. Ryan
Adjusting the skeleton and pore structure of porous SiCOH dielectrics
- S. Gates
- G. Dubois
- et al.
- 2009
- JES
Property modifications of nanoporous pSiCOH dielectrics to enhance resistance to plasma-induced damage
- E. Todd Ryan
- Stephen M. Gates
- et al.
- 2008
- Journal of Applied Physics
Line resistance and electromigration variations induced by hydrogen-based plasma modifications to the silicon carbonitride/copper interface
- E. Todd Ryan
- Jeremy Martin
- et al.
- 2007
- JES