Fully subtractive Ru Topvia interconnects with minimum 9 nm-space airgap for RC performance and reliability enhancement as post-Cu interconnects
- Koichi Motoyama
- Jaemyung Choi
- et al.
- 2024
- IEDM 2024
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6 results for Andrew Simon
The Extreme Extendibility of Cu and Post-Cu Dual Damascene BEOL Interconnect Technology
- Daniel Edelstein
- Son Nguyen
- et al.
- 2024
- IEDM 2024
Optimization of Projected Phase Change Memory for Analog In-Memory Computing Inference
- Ning Li
- Charles Mackin
- et al.
- 2022
- MRS Fall Meeting 2022
Optimization of Projected Phase Change Memory for Application in Analog Neuromorphic Computing
- Ning Li
- Kevin Brew
- et al.
- 2021
- MRS Fall Meeting 2021
Evaluation of different metal preclean conditions for MOL for 2nm and beyond
- Samuel Swaroop Munnangi
- Andrew Simon
- et al.
- 2024
- ASMC 2024
Optimization of Area Selective Barrier on Different Metal Interconnects
- Linda Wangoh
- Andrew Simon
- et al.
- 2024
- ASMC 2024