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Elizabeth Lofano- Eri Hirahara
- Margareta Paunescu
- et al.
- 2015
- SPIE Advanced Lithography 2015
- Luisa D. Bozano
- Ratnam Sooriyakumaran
- et al.
- 2012
- SPIE Photomask Technology + EUV Lithography 2012
- Luisa D. Bozano
- Ratnam Sooriyakumaran
- et al.
- 2012
- Proceedings of SPIE - The International Society for Optical Engineering 2012
- Hiroshi Ito
- Linda K. Sundberg
- et al.
- 2009
- SPIE Advanced Lithography 2009
- Ankit Vora
- Gabriela Alva
- et al.
- 2016
- J. Photopolym. Sci. Tech.
- Ankit Vora
- Anindarupa Chunder
- et al.
- 2015
- J. Photopolym. Sci. Tech.
- Ankit Vora
- Anindarupa Chunder
- et al.
- 2014
- J. Photopolym. Sci. Tech.
- Younes Ansari
- Kumar Virwani
- et al.
- 2018
- Advanced Energy Materials