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Donald S. Bethune- G.W. Burr
- K. Virwani
- et al.
- 2012
- VLSI Technology 2012
- R.S. Shenoy
- K. Gopalakrishnan
- et al.
- 2011
- VLSI Technology 2011
- K. Gopalakrishnan
- R.S. Shenoy
- et al.
- 2010
- VLSI Technology 2010
- Andrew J. Merriam
- Donald S. Bethune
- et al.
- 2007
- SPIE Advanced Lithography 2007
- Andrew J. Merriam
- James J. Jacob
- et al.
- 2007
- ASSP 2007
- Y. Kang
- D.S. Bethune
- et al.
- 2003
- LEOS 2003
- Y. Kang
- D.S. Bethune
- et al.
- 2003
- SPIE ITCom 2003
- 2002
- Physica B: Condensed Matter