Advanced fast 3D DSA model development and calibration for design technology co-optimization
- Kafai Lai
- Balint Meliorisz
- et al.
- 2017
- SPIE Advanced Lithography 2017
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Modeling and parameter tuning for templated directed self-Assembly
- Balint Meliorisz
- T. Mülders
- et al.
- 2016
- SPIE Advanced Lithography 2016